InfinitiCell®2000 enables reproducible control of growth rates and compositions with ±0.1% accuracy using our patent-pending metal pump and level sensor technology.
The InfinitiCell®2000 is a breakthrough solution offering significant advantages (>10x) in process stability, throughput, and loading capacity.
RJM Semiconductor is inserting InfinitiCell®2000 technology into emerging markets for high volume production of Cu(In,Ga)Se2 thin film Solar Cells, Li Ion Batteries, and MBE wafer growth to provide the lowest manufacturing costs in the industry.
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InfinitiCell® Linear Evaporator for in-line and web vacuum coaters. Computer modeling of static flux distribution (colored region) and integrated thickness distribution on moving substrate (white line). Substrate width = 120cm (between dotted red lines), thickness uniformity = +/-1%, and material yield on substrate = 79%.
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| InfinitiCell Linear Evaporator Performance Advantages |
| - World’s first and only linear vacuum evaporator with self-calibrating beam flux. |
| - Patent-pending design with demonstrated constant flux control to +/-0.1% |
| - Thickness uniformity = +/-1% and material yield = 80% over 120cm width substrate. |
| - Targeting 15% efficiency in CIGS solar modules. |
| - Uniform metallization for Li+ ion batteries. |
| - High throughput metals deposition for in-line and web vacuum coaters. |
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| Component |
Material |
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Evaporator, Cylinder, Piston,
Evaporator Filament,
Cylinder Filament |
PG-Coated Ultra-High Purity Graphite |
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| Nosecone/Level Sensor Probe |
PBN-Coated Ultra-High Purity Graphite |
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| Maximum Loading Capacity |
Shaped Charges |
Ingots |
| Ga or In |
2000 gm |
1200 gm (typical) |
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| Electrical Connections |
Temp Range |
Power Supply |
| Evaporator Filament |
20-1400 C |
15A x 120V |
| Cylinder Filament |
20-1400 C |
15A x 120V |
| Evaporator TC = Type C |
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| Cylinder TC = Type C |
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| Level Sensor Probe (2 wire) |
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| Cell Ground (1 wire) |
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| Water Cooling Jacket |
Flow |
Pressure/Temp |
| Recirculating D.I. Water |
0.3 l/min (operating) |
3-5 bar @ 20 C inlet |
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1 l/min (outgassing) |
3-5 bar @ 20 C inlet |
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| Flanges |
Flange Size/Angle |
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| Cell Loading Flange |
6” CF |
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| MBE Mounting Flange |
Standard: 4.5” or 6” CF |
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Option: 4.625” or 8” CF |
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| MBE Port Inclination |
30-75° from vertical |
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Control Mode for
Metal Height in Evaporator |
Piston Drive |
Probe Resistance
to Ground |
| Standard: Manual |
Manually Driven
Linear Actuator |
Metal at contact:
R < 10Ω (typical) |
| Option: Automatic |
Stepper-Motor Driven Linear Actuator with EpiLock™ Control Unit |
Metal below contact:
R > 1MΩ (typical) |
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