InfinitiCell® enables reproducible control of growth rates and compositions with ±0.2% accuracy using our patent-pending metal pump and level sensor technology.
The InfinitiCell® is a breakthrough solution offering significant advantages (>10x) in process stability, throughput, and loading capacity.
RJM Semiconductor is inserting InfinitiCell® technology into emerging markets for high volume production of Cu(In,Ga)Se2 thin film Solar Cells, Li Ion Batteries, and MBE wafer growth to provide the lowest manufacturing costs in the industry.
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InfinitiCell® Linear Evaporator for in-line and web vacuum coaters. Computer modeling of static flux distribution (colored region) and integrated thickness distribution on moving substrate (white line). Substrate width = 120cm (between dotted red lines), thickness uniformity = +/-1%, and material yield on substrate = 79%.
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| InfinitiCell Linear Evaporator Performance Advantages |
| - World’s first and only linear vacuum evaporator with self-calibrating beam flux. |
| - Patent-pending design with demonstrated constant flux control to +/- 0.2% |
| - Thickness uniformity = +/- 2% and material yield = 79% over 120cm width substrate. |
| - Targeting 15% efficiency in CIGS solar modules. |
| - Uniform metallization for Li+ ion batteries. |
| - High throughput metals deposition for in-line and web vacuum coaters. |
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| MBE InfinitiCell 2000 Data Sheet |
| Component |
Material |
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Evaporator, Cylinder, Piston,
Evaporator Filament,
Cylinder Filament |
PG-Coated Ultra-High Purity Graphite |
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| Nosecone/Level Sensor Probe |
PBN-Coated Ultra-High Purity Graphite |
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| Maximum Loading Capacity |
Shaped Charges |
Ingots |
| Ga or In |
gm |
1200 gm (typical) |
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| Electrical Connections |
Temp Range |
Power Supply |
| Evaporator Filament |
20-1400 C |
15A x 120 V |
| Cylinder Filament |
20-1400 C |
15A x 120 V |
| Evaporator TC = Type C |
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| Cylinder TC = Type C |
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| Level Sensor Probe (2 wire) |
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| Cell Ground (1 wire) |
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| Water Cooling Jacket |
Flow |
Pressure/Temp |
| Recirculating D.I. Water |
0.3 l/min (operating) |
3-5 bar @ 20 C inlet |
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1 l/min (outgassing) |
3-5 bar @ 20 C inlet |
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| Flanges |
Flange Size/Angle |
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| Cell Loading Flange |
6” CF |
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| MBE Mounting Flange |
Standard: 4.5” or 6” CF |
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Option: 4.625” or 8” CF |
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| MBE Port Inclination |
30-75° from vertical |
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Control Mode for
Metal Height in Evaporator |
Piston Drive |
Probe Resistance
to Ground |
| Standard: Manual |
Manually Driven
Linear Actuator |
Metal at contact:
R < 10Ω (typical) |
| Option: Automatic |
Stepper-Motor Driven Linear Actuator with EpiLock™ Control Unit |
Metal below contact:
R > 1MΩ (typical) |
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